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Bayesian reconstruction of surface roughness and depth profiles

Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 228: 349-359

Autoren/Herausgeber: Mayer M
Fischer R
Lindig S
von Toussaint U
Stark RW
Dose V
Erschienen: 2005

Bayesian data analysis provides a consistent probabilistic theory for the extraction of sample parameters from spectra measured with MeV ion beam analysis methods. The application of Bayesian data analysis is demonstrated on three different examples, namely the deconvolution of the apparatus function for improving the energy resolution of solid state detectors, the reconstruction of depth profiles of individual elements with confidence intervals from Rutherford backscattering measurements, and the reconstruction of surface-roughness distributions using Rutherford backscattering. (C) 2004 Elsevier B.V. All rights reserved.

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