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The approach to diamond growth on levitating seed particles

Applied Surface Science 254(1): 177-180

Autoren/Herausgeber: Shimizu S
Shimizu T
Annaratone BM
Jacob W
Linsmeier C
Lindig S
Stark RW
Jamitzky F
Thomas H
Sato N
Morfill GE
Erschienen: 2007
We demonstrate the approach of diamond growth on levitating seed particles in a rf plasma. We introduce a hot filament chemical vapor deposition (CVD) technique into the rf plasma chamber in order to obtain improved crystal growth. Firstly, we confirmed diamond nucleation on seed particles placed on a Si substrate using the hot filament CVD. The deposition conditions, namely the total pressure and the rf power, were chosen so that they correspond to particles levitation conditions. We observe that a hydrogen pre-treatment on the seed particles improves the nucleation. Secondly, we confirm the levitation of particles at high temperatures. Fine particles levitated in a plasma are particularly sensitive to thermophoretic effects due to inhomogeneities in the gas heating. Therefore, proper heating procedures are required for successful particles levitation. (C) 2007 Elsevier B.V. All rights reserved.

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